THERMAL DEGRADATION OF SEMICONDUCTORS METALLIZATION EXPOSED TO THE CURRENT PULSE

  • Marina Valerevna Koryachko

Abstract

Work is devoted to the processes of heating metallization layers the passage through them of single current pulses of various shape (duration t=10-1000 ISS, the amplitude is devoted to the processes of heating metallization layers the passage through them of single current pulses of various shape (duration <9.1010 And/m2) up to the development of degradation processes (irreversible change the properties of the patterns associated with the formation and subsequent dynamics of molten zones).
Section
Technical Sciences